Senior PECVD Process Engineer

Primary Duties & Responsibilities

Process Development and Optimization

• Serve as the process owner for PECVD, developing, sustaining, and optimizing processes for GaAs and InP device manufacturing.
• Conduct process characterization and troubleshooting, working cross-functionally with R&D, production, and equipment teams.
• Apply Statistical Process Control (SPC) and Design of Experiments (DOE) to monitor and improve process stability and yield.

• Interface with equipment vendors to evaluate tool performance and upgrades.

Equipment Ownership and Troubleshooting

• Serve as the technical owner for PECVD equipment and associated metrology.
• Lead troubleshooting efforts for process deviations, equipment issues, and yield excursions.
• Work with equipment vendors and maintenance personnel to improve tool performance, reliability, and uptime.

• Support equipment qualification, preventive maintenance, and continuous improvement activities.

Automation, Recipe Management, and Fault Detection

• Support automated recipe download and verification for production tools.
• Work with automation and equipment teams to ensure correct recipe selection, parameter control, and lot tracking.
• Develop and maintain process limits, alarms, interlocks, and fault detection rules.
• Review tool and process data to identify trends, excursions, and early indicators of equipment or process issues.
• Support fault detection and classification systems to improve process control, reduce scrap, and prevent repeat excursions.

• Participate in automation improvements that improve tool utilization, data collection, traceability, and manufacturing consistency.

Yield Improvement and Root Cause Analysis

• Perform failure analysis and defect characterization to identify root causes of process variation.
• Develop and implement process improvements to increase yield, improve film quality, and reduce defectivity.

• Lead continuous improvement initiatives focused on productivity, equipment utilization, and process capability.

Documentation and Training

• Develop and maintain process documentation, work instructions, FMEAs, process specifications, and control plans.
• Train technicians and junior engineers on equipment operation, process control, troubleshooting, and best practices.

• Support new equipment installations, process qualifications, and technology transfers.

Education & Experience

• Bachelor’s or Master’s degree in Materials Science, Chemical Engineering, Electrical Engineering, or related field.

• 5+ years of experience in semiconductor PECVD or thin films process engineering.

Skills

• Strong understanding of SiNx, SiOx, and other PECVD films, including the relationship between process parameters, gas chemistry, plasma conditions, chamber conditioning, clean cycles, and resulting film properties.
• Experience with thin-film metrology including ellipsometry, reflectometry, profilometry, FTIR, stress/bow measurement, SEM, or similar techniques.
• Experience in optimizing film thickness, RI, deposition rate, uniformity, stress, and film composition.
• Ability to work on-site in a semiconductor manufacturing and cleanroom environment.
• Ability to provide off-hours support as needed for critical manufacturing or equipment issues.
• Solid background in SPC, Gage R&R, DOE, and root cause analysis.
• Proficient in JMP, Excel, and other Microsoft Office software.
• Excellent documentation, troubleshooting, and communication skills.
• Experience with MES systems (e.g., Camstar) is a plus.

• Direct GaAs and/or InP process experience is highly desirable.
• Experience with high-volume semiconductor manufacturing.
• Knowledge of additional fab areas such as photolithography, etch, or metals.

• Familiarity with device-level impacts of film properties and process integration.

Working Conditions

• Will be exposed to areas where hand tools and power tools are being operated
• Will be exposed to areas where hazardous chemicals or gases are stored

• Ability to work in a cleanroom environment per semi-conductor protocol/requirements

Physical Requirements

• Work in a class 100/1000 clean room for extended periods
• Wear full cleanroom attire (smock, mask, etc.)
• Work with and/or around chemicals (such as solids and acids)
• Stand for up to 4 hours at a time
• Lift up to 16-30 Pounds
• Push/Pull up to 16-30 pounds
• Sit for up to 4 hours at a time

Safety Requirements

All employees are required to follow the site EHS procedures and Coherent Corp. Corporate EHS standards.

Quality and Environmental Responsibilities

Depending on location, this position may be responsible for the execution and maintenance of the ISO 9000, 9001, 14001 and/or other applicable standards that may apply to the relevant roles and responsibilities within the Quality Management System and Environmental Management System.

Culture Commitment

Ensure adherence to company’s values (ICARE) in all aspects of your position at Coherent Corp.:

Integrity – Create an Environment of Trust

Collaboration – Innovate Through the Sharing of Ideas

Accountability – Own the Process and the Outcome

Respect – Recognize the Value in Everyone

Enthusiasm – Find a Sense of Purpose in Work

Coherent Corp. is an equal opportunity/affirmative action employer. All qualified applicants will receive consideration for employment without regard to sex, gender identity, sexual orientation, race, color, religion, national origin, disability, protected Veteran status, age, or any other characteristic protected by law.